Product Center

Silicon CMP Polishing Slurry

TJHG-SH-2034
I. Product Introduction

TJHG-SH-2034 silicon material CMP polishing slurry is a high-end product manufactured by Guangdong Tengjun Chemical Technology Co., Ltd., widely used in the polishing process of large-size silicon wafers. In practical applications, this product has been highly praised by customers for its superior performance, including high concentration, high purity, low metal ion contamination, high rate stability, and good consistency. Since its market launch, this product has received positive feedback from numerous customers and has passed testing on multiple production lines in China, achieving excellent application results and reaching the performance level of imported products from the US and Japan.

II. Main Features

TJHG-SH-2034 silicon material CMP polishing slurry uses SiO2 hydrosol, synthesized in-house, as the abrasive. The synthesis process employs a new synthesis technology and automated production control, improving particle size uniformity and purity compared to traditional colloids, making it specifically designed for high-end products. The product formulation process employs a closed-loop, automated method. All auxiliary reagents adhere to strict testing standards and are prepared and synthesized on-site, avoiding product quality issues caused by instability during raw material storage. Different formulation ratios can be optimized as needed during polishing to achieve the best performance. Compared to similar products from the US and Japan, this product offers advantages such as high concentration, controllable abrasive particle size, low surface tension, easy cleaning of organic matter, metal ions, and particles, high polishing rate, no heterogeneous pitting at high temperatures, and excellent polishing consistency.

III. Main Applications

Primarily used for high-quality polishing of multi-diffused silicon wafers, it can also be used for polishing processes of raw germanium, silicon dioxide, and other materials.

IV. Basic Parameters